MEMS & Sensors

A microsystem (or MEMS – Micro Electro Mechanical System, or MicroTAS-Micro Total Analysis System) is an integrated miniaturized electronic system which may include sensors, actuators, signal processing circuits and other structures, together with power supply/management, interfaces, packaging and ancillary elements. During the last decade, the addition of nanostructures/nanomaterials to improve the device/system performances has led to the concept of micro/nanosystems or MEMS/NEMS.
Micro/Nano System schema.
Micro / Nano Integrated System.

The main applications fields are:Applications_Micro-NanoSystem2


  • Coupling a branch enclosure with differential Mobility Spectrometry to isolate and measure plant volatiles in contained greenhouse settings. M.M. McCartney, S.L. Spitulski, A. Pasamontes, D.J. Peirano, M.J. Schirle, R. Cumeras, J.D. Simmons, J.L. Ware, J.F. Brown, A.J.Y. Poh, S.C. Dike, E.K. Foster, K.E. Godfrey, C.E. Davis. Talanta, 2016, 146: 148-54. DOI:
  • Sniffing Plants – Technology for Capturing VOC Signatures and What They May Tell Us. R. Fink, L. Thuesen, I. Pavlovsky, A.A. Aksenov, D.J. Peirano, A. Pasamontes, J.D. Pedersen, W.HK.Cheung, A.G. Fung, M.M. McCartney, R. Cumeras, Y. Zrodnikov, C.E. Davis.  Southern Forest Insect Work Conference. Charleston, SC, USA. July 22-25th 2014.
  • IDBR: Portable monitoring device for off-gassed volatile plant metabolites. Y. Zrodnikov, A.G. Fung, J.D. Pedersen, A.A. Aksenov, M.J. Schirle, D.J. Peirano, R. Cumeras, W.HK. Cheung, A. Pasamontes, C.E. Davis. National Science Foundation IDBR Program, PI workshop, Arlington, VA, USA. May 1-2nd 2014.
  • Prototyping a low cost PFAIMS. R. Cumeras, S.Vallejos, E. Figueras, C.Cané, I. Gràcia.In Abstracts of Papers Presented on the workshop “Microsistemas y Nanotecnología IBERNAM 2013”, Page 22. Badajoz, November 21-22nd 2013.
  • Localized heating to tungsten oxide nanostructures deposition on gas microsensor arrays via aerosol assisted CVD. S. Vallejos, R. Cumeras, E. Figueras, C. Cané., C. Blackman, I. Gràcia., In Proceedings of the Transducers 2013 & Eurosensors XXVII, Pages 1166-1169. The 17th International Conference on Solid-State Sensors, Actuators and Microsystems. Barcelona, Spain, June 16-20th 2013. DOI: 10.1109/Transducers.2013.6626980.
  • Sensors and Micro and Nano Technologies for the Food Sector. I. Gràcia, S. Vallejos, R. Cumeras, M. Salleras, E. Figueras, J. Santander, N. Sabaté, J.P.Esquivel, C. Calaza, L. Fonseca, C. Cané. In Proceedings of the 9th Spanish Conference on Electron Devices (CDE 13), Pages 103-106. IEEE Catalog Number: 13399018. E-ISBN: 978-1-4673-4667-2, P-ISBN: 978-1-4673-4666-5, DOI: 10.1109/CDE.2013.6481353. Valladolid, February 12-14th 2013.
  • A Gas Sensor: the Ion Mobility Spectrometer. R. Cumeras, ORAL PRESENTATION. In Abstracts of Papers Presented to the First Interdisciplinary phD Student Conference (“Primera joranda d’Investigadors Predoctorals Interdisciplinària”), Pages 11-12. Barcelona, Spain. February, 7th 2013.
  • Technologies for gas sensors: from MOX to IMS. R. Cumeras, S. Vallejos, I. Gràcia, E. Figueras, C. Calaza, M. Salleras, L. Fonseca, C. Cané., In Abstracts of Papers Presented on the 6èmes Journées Franco-espagnoles IBERNAM – CMC2: Microsystems. Marseille, France. November 22-23rd 2012.
  • Modelling a P-FAIMS with Multiphysics FEM. R.Cumeras, I.Gràcia, E.Figueras, L.Fonseca, J.Santander, M.Salleras, C.Calaza, N.Sabaté, C.Cané., Journal of Mathematical Chemistry, 2012, 50 (2): 359-373. DOI: 10.1007/s10910-010-9772-5.
  • Finite-Element Analysis of a Miniaturized Ion Mobility Spectrometer for Security Applications. R.Cumeras, I.Gràcia, E.Figueras, L.Fonseca, J.Santander, M.Salleras, C.Calaza, N.Sabaté, C.Cané., Sensors and Actuators B-Chemistry, 2012, 170: 13-20. DOI: 10.1016/j.snb.2010.11.047.
  • Micro-Nano Technologies for Gas Sensing Devices. C. Cané, I. Gràcia, R. Cumeras, C. Calaza, M. Salleras, J. Santander, E. Figueras, L. Fonseca, N. Sabaté, D. Matatagui, M.J. Fernández, J.L. Fontecha, J. Gutiérrez, M.C. Horrillo.In Proceedings of the Baltic Polymer Symposium 2010: International Session on Nanomaterials: fabrication, characterization and applications, Page 163. Palanga, Lithuania, September 8-11th 2010.
  • Modeling Vapor Detection in a Micro Ion Mobility Spectrometer for Security Applications., R.Cumeras, I.Gràcia, E.Figueras, L.Fonseca, J.Santander, M.Salleras, C.Calaza, N.Sabaté, C.Cané. Procedia Engineering, 2010, 5: 1236-1239. DOI:10.1016/j.proeng.2010.09.336.



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